Manufacturing process control for microelectronic devices and circuits : 20-21 October 1994, Austin, Texas

Format:

• Book

Contributor:

• Sabnis, Anant G, Contributor.
• Society of Photo-optical Instrumentation Engineers, Content Provider.
• Society of Photo Optical Instrumentation Engineers, Content Provider.

Series:

• Proceedings / SPIE--the International Society for Optical Engineering Manufacturing process control for microelectronic devices and circuits

Language:

English

Subjects (All):

• Integrated circuits--Design and construction--Congresses.
• Integrated circuits--Very large scale integration--Design and construction--Congresses.
• Process control--Congresses.

Place of Publication:

[Place of publication not identified] SPIE 1994

Language Note:

English

Notes:

Bibliographic Level Mode of Issuance: Monograph