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Manufacturing process control for microelectronic devices and circuits : 20-21 October 1994, Austin, Texas
- Format:
- Book
- Series:
- Proceedings / SPIE--the International Society for Optical Engineering Manufacturing process control for microelectronic devices and circuits
- Language:
- English
- Subjects (All):
- Integrated circuits--Design and construction--Congresses.
- Integrated circuits.
- Integrated circuits--Very large scale integration--Design and construction--Congresses.
- Process control--Congresses.
- Process control.
- Place of Publication:
- [Place of publication not identified] SPIE 1994
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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