Manufacturing process control for microelectronic devices and circuits : 20-21 October 1994, Austin, Texas

MLA

Sabnis, Anant G, Society of Photo-optical Instrumentation Engineers and Society of Photo Optical Instrumentation Engineers. Manufacturing process control for microelectronic devices and circuits : 20-21 October 1994, Austin, Texas. [Place of publication not identified] SPIE 1994

APA

Sabnis, A., Society of Photo-optical Instrumentation Engineers & Society of Photo Optical Instrumentation Engineers. (1994). Manufacturing process control for microelectronic devices and circuits : 20-21 October 1994, Austin, Texas. [Place of publication not identified] SPIE.

Chicago

Sabnis, Anant G, Society of Photo-optical Instrumentation Engineers and Society of Photo Optical Instrumentation Engineers. Manufacturing process control for microelectronic devices and circuits : 20-21 October 1994, Austin, Texas. [Place of publication not identified] SPIE 1994