In-line characterization, yield reliability, and failure analyses in microelectronic manufacturing : 19-21 May, 1999, Edinburgh, Scotland

Format:

Book

Contributor:

Amberiadis, Kostas, Contributor.

Society of Photo Optical Instrumentation Engineers, Content Provider.

European Optical Society, Content Provider.

Institution of Electrical Engineers, Content Provider.

Society of Photo-optical Instrumentation Engineers, Content Provider.

European Commission, Content Provider.

Scottish Enterprise, Content Provider.

Series:

Proceedings EurOpt series In-line characterization, yield reliability, and failure analyses in microelectronic manufacturing

Language:

English

Subjects (All):

Integrated circuits--Very large scale integration--Design and construction--Congresses.

Integrated circuits.

Semiconductors--Design and construction--Congresses.

Semiconductors.

Manufacturing processes--Materials--Congresses.

Manufacturing processes.

Microelectronics--Congresses.

Microelectronics.

Place of Publication:

[Place of publication not identified] SPIE 1999

Language Note:

English

Notes:

Bibliographic Level Mode of Issuance: Monograph