In-line characterization, yield reliability, and failure analyses in microelectronic manufacturing : 19-21 May, 1999, Edinburgh, Scotland

MLA

Amberiadis, Kostas, et al. In-line characterization, yield reliability, and failure analyses in microelectronic manufacturing : 19-21 May, 1999, Edinburgh, Scotland. [Place of publication not identified] SPIE 1999

APA

Amberiadis, K., Society of Photo Optical Instrumentation Engineers, European Optical Society, Institution of Electrical Engineers , Society of Photo-optical Instrumentation Engineers, European Commission & Scottish Enterprise. (1999). In-line characterization, yield reliability, and failure analyses in microelectronic manufacturing : 19-21 May, 1999, Edinburgh, Scotland. [Place of publication not identified] SPIE.

Chicago

Amberiadis, Kostas, Society of Photo Optical Instrumentation Engineers, European Optical Society, Institution of Electrical Engineers , Society of Photo-optical Instrumentation Engineers, European Commission and Scottish Enterprise. In-line characterization, yield reliability, and failure analyses in microelectronic manufacturing : 19-21 May, 1999, Edinburgh, Scotland. [Place of publication not identified] SPIE 1999