1 option
Process and equipment control in microelectronic manufacturing : 19-20 May, 1999, Edinburgh, Scotland
- Format:
- Book
- Series:
- Proceedings EurOpt series Process and equipment control in microelectronic manufacturing
- Language:
- English
- Subjects (All):
- Microelectronics industry--Production control--Congresses.
- Microelectronics industry.
- Integrated circuits--Very large scale integration--Design and construction--Congresses.
- Integrated circuits.
- Microelectronics--Materials--Congresses.
- Microelectronics.
- Place of Publication:
- [Place of publication not identified] SPIE 1999
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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