Process and equipment control in microelectronic manufacturing : 19-20 May, 1999, Edinburgh, Scotland

MLA

Narasimhan, Murali K., et al. Process and equipment control in microelectronic manufacturing : 19-20 May, 1999, Edinburgh, Scotland. [Place of publication not identified] SPIE 1999

APA

Narasimhan, M., Yallup, K., Society of Photo-Optical Instrumentation Engineers, European Optical Society & European Commission. (1999). Process and equipment control in microelectronic manufacturing : 19-20 May, 1999, Edinburgh, Scotland. [Place of publication not identified] SPIE.

Chicago

Narasimhan, Murali K., Kevin Yallup, Society of Photo-Optical Instrumentation Engineers, European Optical Society and European Commission. Process and equipment control in microelectronic manufacturing : 19-20 May, 1999, Edinburgh, Scotland. [Place of publication not identified] SPIE 1999