LAMOM : laser applications in microelectronic and optoelectronic manufacturing XXII : 30 January-2 February 2017, San Francisco, California, United States / Beat Neuenschwander [and three others], editors ; sponsored by SPIE.

Format:

• Book

Contributor:

• Neuenschwander, Beat, editor.
• Society of Photo-optical Instrumentation Engineers, sponsoring body.

Series:

• Proceedings of SPIE--the International Society for Optical Engineering ; 1996-756X. Volume 10091.
• Proceedings of SPIE ; Volume 10091

Language:

English

Subjects (All):

• Lasers--Industrial applications--Congresses.
• Manufacturing processes--Congresses.
• Microelectronics--Congresses.

Physical Description:

1 online resource (235 pages).

Other Title:

Laser Applications in Microelectronic and Optoelectronic Manufacturing

Place of Publication:

Bellingham, Washington : SPIE, 2017.

Notes:

Description based on: online resource; title from pdf title page (SPIE Digital Library, viewed November 14, 2018).

ISBN:

1-5106-0624-6