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LAMOM : laser applications in microelectronic and optoelectronic manufacturing XXII : 30 January-2 February 2017, San Francisco, California, United States / Beat Neuenschwander [and three others], editors ; sponsored by SPIE.
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; 1996-756X. Volume 10091.
- Proceedings of SPIE ; Volume 10091
- Language:
- English
- Subjects (All):
- Lasers--Industrial applications--Congresses.
- Manufacturing processes--Congresses.
- Microelectronics--Congresses.
- Physical Description:
- 1 online resource (235 pages).
- Other Title:
- Laser Applications in Microelectronic and Optoelectronic Manufacturing
- Place of Publication:
- Bellingham, Washington : SPIE, 2017.
- Notes:
- Description based on: online resource; title from pdf title page (SPIE Digital Library, viewed November 14, 2018).
- ISBN:
- 1-5106-0624-6
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