LAMOM : laser applications in microelectronic and optoelectronic manufacturing XXII : 30 January-2 February 2017, San Francisco, California, United States
MLA
Neuenschwander, Beat and Society of Photo-optical Instrumentation Engineers. LAMOM : laser applications in microelectronic and optoelectronic manufacturing XXII : 30 January-2 February 2017, San Francisco, California, United States. Bellingham, Washington : SPIE, 2017.
APA
Neuenschwander, B. & Society of Photo-optical Instrumentation Engineers. (2017). LAMOM : laser applications in microelectronic and optoelectronic manufacturing XXII : 30 January-2 February 2017, San Francisco, California, United States. Bellingham, Washington : SPIE.
Chicago
Neuenschwander, Beat and Society of Photo-optical Instrumentation Engineers. LAMOM : laser applications in microelectronic and optoelectronic manufacturing XXII : 30 January-2 February 2017, San Francisco, California, United States. Edited by Beat Neuenschwander. Bellingham, Washington : SPIE, 2017.