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RTP 2005 : 13th IEEE International Conference on Advanced Thermal Processing of Semiconductors : October 4-7, 2005, Fess Parker's Double Tree Resort Hotel, Santa Barbara, CA / IEEE, Electron Devices Society.
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- Book
- Conference/Event
- Conference Name:
- IEEE International Conference on Advanced Thermal Processing of Semiconductors (13th : 2005 : Santa Barbara, Calif.)
- Language:
- English
- Subjects (All):
- Semiconductors--Heat treatment--Congresses.
- Semiconductors.
- Rapid thermal processing--Congresses.
- Rapid thermal processing.
- Semiconductor doping--Congresses.
- Semiconductor doping.
- Semiconductors--Defects--Congresses.
- Semiconductors--Defects.
- Semiconductors--Heat treatment.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- 290 unnumbered pages : illustrations, digital, PDF files
- Other Title:
- Advanced thermal processing of semiconductors
- Place of Publication:
- Piscataway, NJ : IEEE, [2005]
- System Details:
- Mode of access: World Wide Web.
- text file
- Notes:
- "IEEE catalog number: 05EX1090"--T.p. verso.
- Includes bibliographical references.
- Electronic reproduction. [New York, N.Y.] : IEEE, [2006]. System requirements: Adobe Acrobat Reader. Mode of access: World Wide Web. Made available through IEEE Xplore under title: Advanced Thermal Processing of Semiconductors, 2005, RTP 2005, 13th IEEE International Conference on. s2006 nyun s
- ISBN:
- 078039223X
- 9780780392236
- OCLC:
- 70281698
- Access Restriction:
- Restricted for use by site license.
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