RTP 2005 : 13th IEEE International Conference on Advanced Thermal Processing of Semiconductors : October 4-7, 2005, Fess Parker's Double Tree Resort Hotel, Santa Barbara, CA

MLA

IEEE Electron Devices Society. and IEEE Xplore (Online service). RTP 2005 : 13th IEEE International Conference on Advanced Thermal Processing of Semiconductors : October 4-7, 2005, Fess Parker's Double Tree Resort Hotel, Santa Barbara, CA. Piscataway, NJ : IEEE, [2005]

APA

IEEE Electron Devices Society. & IEEE Xplore (Online service). (2005). RTP 2005 : 13th IEEE International Conference on Advanced Thermal Processing of Semiconductors : October 4-7, 2005, Fess Parker's Double Tree Resort Hotel, Santa Barbara, CA. Piscataway, NJ : IEEE.

Chicago

IEEE Electron Devices Society. and IEEE Xplore (Online service). RTP 2005 : 13th IEEE International Conference on Advanced Thermal Processing of Semiconductors : October 4-7, 2005, Fess Parker's Double Tree Resort Hotel, Santa Barbara, CA. Piscataway, NJ : IEEE, [2005]