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Chemical vapor deposition : thermal and plasma deposition of electronic materials / S. Sivaram.
LIBRA TK7836 .S54 1995
Available from offsite location
- Format:
- Book
- Author/Creator:
- Sivaram, S.
- Language:
- English
- Subjects (All):
- Microelectronics industry.
- Chemical vapor deposition.
- Microelectronics--Materials.
- Microelectronics.
- Physical Description:
- xii, 292 pages : illustrations ; 24 cm
- Place of Publication:
- New York : Van Nostrand Reinhold, [1995]
- Notes:
- Includes bibliographical references and index.
- ISBN:
- 0442010796
- OCLC:
- 31330483
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