Chemical vapor deposition : thermal and plasma deposition of electronic materials

MLA

Sivaram, S. Chemical vapor deposition : thermal and plasma deposition of electronic materials. New York : Van Nostrand Reinhold, [1995]

APA

Sivaram, S. (1995). Chemical vapor deposition : thermal and plasma deposition of electronic materials. New York : Van Nostrand Reinhold.

Chicago

Sivaram, S. Chemical vapor deposition : thermal and plasma deposition of electronic materials. New York : Van Nostrand Reinhold, [1995]