1 option
SiO2 and its interfaces : symposium held November 30-December 5, 1987, Boston, Massachusetts, U.S.A. / editors, S.T. Pantelides, G. Lucovsky.
LIBRA TK7871.15.S55 S5 1988
Available from offsite location
- Format:
- Book
- Series:
- Materials Research Society symposia proceedings ; v. 105.
- Materials Research Society symposia proceedings
- Language:
- English
- Subjects (All):
- Microelectronics--Materials--Congresses.
- Microelectronics.
- Microelectronics--Materials.
- Silicon--Congresses.
- Silicon.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- ix, 329 pages : illustrations ; 24 cm.
- Place of Publication:
- Pittsburgh, Pa. : Materials Research Society, [1988]
- Notes:
- On t.p. "2" is subscript.
- Includes bibliographies and indexes.
- ISBN:
- 0931837731
- OCLC:
- 18136596
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