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Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A. / editors, James C. Sturm ... [and others].
LIBRA TK7871.85 .S547 1988
Available from offsite location
- Format:
- Book
- Series:
- Materials Research Society symposia proceedings ; v. 107.
- Materials Research Society symposia proceedings
- Language:
- English
- Subjects (All):
- Semiconductors--Design and construction--Congresses.
- Semiconductors.
- Semiconductors--Design and construction.
- Ion implantation--Congresses.
- Ion implantation.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- xvii, 524 pages : illustrations ; 24 cm.
- Place of Publication:
- Pittsburgh, Pa. : Materials Research Society, [1988]
- Notes:
- Includes bibliographies and indexes.
- ISBN:
- 0931837758
- OCLC:
- 17916303
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