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Microelectronics processing : chemical engineering aspects / Dennis W. Hess, editor, Klavs F. Jensen, editor.
LIBRA 540.8 Ad99 no.1-no.5, no.7-no.34, no.36-no.65,no.101-102,121
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LIBRA QD1 .A355 no.221
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Kislak Center for Special Collections - E.F. Smith Collection QD1 .A355 Scattered vols. (no.61 in 547.09 K267) no.85, no.138, no.171, no.190, no.205,
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Chemistry Library - Books QD1 .A355 Scattered vols. no. 15-16, 18, 22, 29-30, 40, 42, 49-50, 54, 56, 58, 61-62, 68, 72, 74-76, 81-82, 90, 101-102, 137, 150, 167-168, 173, 175, 186-189, 192, 194-199, 201, 203, 215, 226, 228, 230, 238
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Penn Museum Library QD1 .A355 Scattered vols. no.138, no.164, no.171, no.205, no.220, no.225,
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Veterinary: Atwood Library (Campus) QD1 .A355 no.30
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- Format:
- Book
- Series:
- Advances in chemistry series 0065-2393 ; 221.
- Advances in chemistry series. 0065-2393 ; 221
- Language:
- English
- Subjects (All):
- Microelectronics--Materials.
- Microelectronics.
- Integrated circuits--Design and construction.
- Integrated circuits.
- Surface chemistry.
- Physical Description:
- xiv, 547 pages : illustrations ; 24 cm.
- Place of Publication:
- Washington, DC : American Chemical Society, 1989.
- Notes:
- Includes bibliographical references and index.
- ISBN:
- 0841214751
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