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IEEE/SEMI International Semiconductor Manufacturing Science Symposium.
LIBRA TK7871.85 .I225 1989-1993
Available from offsite location
- Format:
- Conference/Event
- Journal/Periodical
- Conference Name:
- IEEE/SEMI International Semiconductor Manufacturing Science Symposium.
- Language:
- English
- Subjects (All):
- Semiconductors--Design and construction--Congresses.
- Semiconductors.
- Semiconductors--Design and construction.
- Semiconductor industry--Congresses.
- Semiconductor industry.
- Computer integrated manufacturing systems--Congresses.
- Computer integrated manufacturing systems.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- 5 volumes : illustrations ; 28 cm
- Annual
- 1989-1993.
- Other Title:
- International Semiconductor Manufacturing Science Symposium
- ISMSS
- Proceedings, International Semiconductor Manufacturing Science Symposium (ISMSS)
- Continued By:
- International Symposium on Semiconductor Manufacturing. Proceedings
- Place of Publication:
- New York, NY : Institute of Electrical and Electronics Engineers, 1989-1993.
- Notes:
- Symposium for 1989- sponsored by Semiconductor Equipment and Materials International, IEEE Components, Hybrids and Manufacturing Technology Society, and IEEE Electron Devices Society.
- OCLC:
- 20462502
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