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Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications / edited by Klaus K. Schuegraf.

Chemistry Library - Books TK7872.T55 H36 1988
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LIBRA TK7872.T55 H36 1988
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Format:
Book
Contributor:
Schuegraf, Klaus K.
Language:
English
Subjects (All):
Thin film devices--Design and construction--Handbooks, manuals, etc.
Thin film devices.
Thin film devices--Design and construction.
Genre:
Handbooks and manuals.
Physical Description:
xvii, 413 pages : illustrations ; 25 cm
Other Title:
Hand book of thin-film deposition processes and techniques.
Place of Publication:
Park Ridge, N.J., U.S.A. : Noyes Publications, [1988]
Notes:
Includes bibliographies and index.
ISBN:
0815511531 :
OCLC:
17234252

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