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Semiconductor materials and process technology handbook : for very large scale integration (VLSI) and ultra large scale integration (ULSI) / edited by Gary E. McGuire.
LIBRA TK7874 .S4178 1988
Available from offsite location
- Format:
- Book
- Series:
- Materials science and process technology series
- Materials science and process technology series.
- Language:
- English
- Subjects (All):
- Integrated circuits--Very large scale integration--Design and construction--Handbooks, manuals, etc.
- Integrated circuits.
- Integrated circuits--Very large scale integration--Design and construction.
- Genre:
- Handbooks and manuals.
- Physical Description:
- xiii, 675 pages : illustrations ; 25 cm.
- Place of Publication:
- Park Ridge, N.J., U.S.A. : Noyes Publications, [1988]
- Summary:
- A broad review of semiconductor materials and process technology with emphasis on VLSI and ULSI.
- Notes:
- Includes bibliographies and index.
- ISBN:
- 0815511507 :
- OCLC:
- 17200288
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