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Epitaxial silicon technology / edited by B. Jayant Baliga.
Chemistry Library - Books TK7871.85 .E65 1986
Available
- Format:
- Book
- Language:
- English
- Subjects (All):
- Semiconductors--Design and construction.
- Semiconductors.
- Silicon crystals--Growth.
- Silicon crystals.
- Epitaxy.
- Physical Description:
- viii, 328 pages : illustrations ; 24 cm
- Place of Publication:
- Orlando : Academic Press, 1986.
- Contents:
- Silicon vapor phase epitaxy / H.M. Liaw and J.W. Rose
- Silicon molecular beam epitaxy / Subramanian S. Iyer
- Silicon liquid phase epitaxy / B. Jayant Baliga
- Silicon on sapphire heteroepitaxy / Prahalad K. Vasudev
- Silicon-on-insulator epitaxy / Hon Wai Lam.
- Notes:
- Includes bibliographies and index.
- ISBN:
- 0120771209
- OCLC:
- 13426011
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