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Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A. / editors, Marc Wittmer, James Stimmell, Michael Strathman.
LIBRA TK7874 .M344 1986
Available from offsite location
- Format:
- Book
- Series:
- Materials Research Society symposia proceedings 0272-9172 ; v. 71.
- Materials Research Society symposia proceedings. 0272-9172 ; v. 71
- Language:
- English
- Subjects (All):
- Microelectronics--Materials--Congresses.
- Microelectronics.
- Microelectronics--Materials.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- xvii, 535 pages : illustrations ; 24 cm.
- Place of Publication:
- Pittsburgh, Pa. : Materials Research Society, [1986]
- Notes:
- Includes bibliographies and indexes.
- ISBN:
- 0931837375 :
- OCLC:
- 14002798
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