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Silicon Wafer Metrology Using Optical Coherence Tomography.
- Format:
- Book
- Author/Creator:
- Walecki, Wojtek J.
- Series:
- Spotlight Series
- Spotlight Series ; v.SL76
- Language:
- English
- Subjects (All):
- Optical coherence tomography.
- Semiconductors.
- Physical Description:
- 1 online resource (79 pages)
- Edition:
- 1st ed.
- Place of Publication:
- Bellingham : SPIE, 2026.
- Summary:
- This book explores the application of Optical Coherence Tomography (OCT) in semiconductor wafer metrology. It provides a comprehensive review of OCT techniques for measuring wafer thickness, curvature, surface topography, and multilayer structures. The author discusses challenges in traditional metrology methods and how OCT addresses these issues, including non-contact measurement, high speed, and precision. The book also covers real-time and frequency-domain OCT, Moiré Fringe OCT, and calibration methods, making it a valuable resource for researchers, engineers, and students in semiconductor technology and photonics. Generated by AI.
- Notes:
- Description based on publisher supplied metadata and other sources.
- Part of the metadata in this record was created by AI, based on the text of the resource.
- Other Format:
- Print version: Walecki, Wojtek J. Silicon Wafer Metrology Using Optical Coherence Tomography
- ISBN:
- 9781510694408
- OCLC:
- 1605656897
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