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Piezoelectric resonators and filters based on periodically polarized alscn and low-jitter temperature-compensated aln oscillators Merrilyn Mercy Adzo Fiagbenu

Dissertations & Theses @ University of Pennsylvania Available online

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Format:
Book
Thesis/Dissertation
Author/Creator:
Fiagbenu, Merrilyn Mercy Adzo, author.
Contributor:
University of Pennsylvania. Electrical and Systems Engineering., degree granting institution.
Language:
English
Subjects (All):
Electrical engineering.
Nanotechnology.
Acoustics.
0544.
0652.
0986.
Local Subjects:
Electrical engineering.
Nanotechnology.
Acoustics.
0544.
0652.
0986.
Genre:
Academic theses
Physical Description:
1 online resource (193 pages)
Contained In:
Dissertations Abstracts International 87-12B
Place of Publication:
Ann Arbor : ProQuest Dissertations and Theses, 2026
Language Note:
English
Summary:
Aluminum nitride (AlN) bulk acoustic wave (BAW) devices dominate acoustic filtering in the mobile market at 3 GHz and below along with surface acoustic wave (SAW) devices. However, the intrinsic electromechanical coupling coefficient of AlN limits the scaling of these BAW devices to higher frequencies to support the increased data processing demands of 5G and higher Wi-Fi communication bands. One way to address the limited electromechanical coupling coefficient of AlN, albeit at the cost of the material's quality factor, is to alloy it with scandium to form scandium-alloyed AlN or aluminum scandium nitride (AlScN). This research work explores the realization of BAW resonators with higher electromechanical coupling coefficients using periodically polarized AlScN. The design, modeling, and characterization of wide-band BAW filters using periodically polarized AlScN is also discussed. Furthermore, a low jitter AlN BAW oscillator with an improved temperature coefficient of frequency is presented
Notes:
Source: Dissertations Abstracts International, Volume: 87-12, Section: B.
Advisors: Olsson, Roy H., III; Allen, Mark G. Committee members: Aflatouni, Firooz; Jariwala, Deep
Ph.D. University of Pennsylvania 2026
Vendor supplied data
Local Notes:
School code: 0175
ISBN:
9798247973850
Access Restriction:
Restricted for use by site license

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