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Superconducting Multilayer Technology for Josephson Devices : Technology, Engineering, Physics, Applications
- Format:
- Book
- Author/Creator:
- Meckbach, Johannes Maximilian
- Series:
- Karlsruher Schriftenreihe zur Supraleitung / Hrsg. Prof. Dr.-Ing. M. Noe, Prof. Dr. rer. nat. M. Siegel
- Language:
- English
- Physical Description:
- 1 online resource (XIII, 175 p. p.)
- Other Title:
- Superconducting Multilayer Technology for Josephson Devices
- Place of Publication:
- KIT Scientific Publishing 2013
- Language Note:
- English
- Summary:
- Within this book fabrication processes for high-quality Josephson junctions based on niobium and aluminum oxide as well as niobium nitride and aluminum nitride on various substrates are discussed. Techniques for achieving a planar chip topography and sub-µm lateral dimensions, aiding the realization of sophisticated Josephson devices such as SQUIDs, flux-flow oscillators and long Josephson junctions with artificial phase discontinuities, are presented in detail.
- ISBN:
- 1000036875
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