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Entwicklung eines maskenlosen Fotolithographiesystems zum Einsatz im Rapid Prototyping in der Mikrofluidik und zur gezielten Oberflächenfunktionalisierung
- Format:
- Book
- Author/Creator:
- Waldbaur, Ansgar
- Series:
- Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie / Hrsg.: Institut für Mikrostrukturtechnik
- Language:
- German
- Physical Description:
- 1 online resource (XVI, 133 p. p.)
- Place of Publication:
- KIT Scientific Publishing 2013
- Language Note:
- German
- Summary:
- In this work, a maskless lithography device based on a micro-mirror array was designed and built. Single projection frames are seamlessly projected next to each other. Microfluidic chips of several cm² size comprising channels of 50 µm have been built of various polymers via direct lithography and casting. Also, bio-chemical ligand patterns comprising 256 different ligand densities have been created in a few seconds on a 5 mm² substrate with pixel sizes of a few µm.
- ISBN:
- 1000036845
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