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X-ray optics made by X-ray lithography: Process optimization and quality control
- Format:
- Book
- Author/Creator:
- Koch, Frieder Johannes
- Series:
- Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie / Hrsg.: Institut für Mikrostrukturtechnik
- Language:
- English
- Physical Description:
- 1 online resource (X, 138 p. p.)
- Other Title:
- X-ray optics made by X-ray lithography
- Place of Publication:
- KIT Scientific Publishing 2017
- Language Note:
- English
- Summary:
- Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample's microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio - their fabrication by X-ray lithography with optimal structure quality is the topic of this work.
- ISBN:
- 1000070029
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