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Prozessentwicklung eines industrietauglichen Verfahrens zur Fertigung von vereinzelten LIGA-Mikrobauteilen
- Format:
- Book
- Author/Creator:
- Heneka, Jochen
- Series:
- Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie / Hrsg.: Institut für Mikrostrukturtechnik
- Language:
- German
- Physical Description:
- 1 online resource (VII, 211 p. p.)
- Place of Publication:
- KIT Scientific Publishing 2015
- Language Note:
- German
- Summary:
- This work deals with the development of an industry suited process aiming on the fabrication (based on the LIGA technique) of near net shape, single microparts. Those microparts should lead to new innovative ideas and thus to successful products on the market.
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