Photomodulated optical reflectance : a fundamental study aimed at non-destructive carrier profiling in silicon / Janusz Bogdanowicz.

Format:

Book

Thesis/Dissertation

Author/Creator:

Bogdanowicz, Janusz.

Series:

Springer theses.

Springer theses, 2190-5053

Language:

English

Subjects (All):

Reflectance.

Light modulators.

Physical Description:

1 online resource (216 p.)

Edition:

1st ed. 2012.

Place of Publication:

Heidelberg ; New York : Springer, c2012.

Language Note:

English

Summary:

One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology. This work develops extensively all the fundamental physical models of the photomodulated optical reflectance technique and introduces novel approaches that extend its applicability from dose monitoring towards detailed carrier profile reconstruction. It represents a significant breakthrough in junction metrology with potential for industrial implementation.

Contents:

Theory of Perturbation of the Reflectance

Theory of Perturbation of the Refractive Index

Theory of Carrier and Heat Transport in Homogeneously Doped Silicon

Extension of the Transport Theory to Ultra-Shallow Doped Silicon Layers

Assessment of the Model

Application of the Model to Carrier Profling.

Notes:

Description based upon print version of record.

Doctoral thesis--University of Leuven.

Includes bibliographical references.

ISBN:

1-283-63004-4

9786613942494

3-642-30108-8

OCLC:

811490081