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Gate Dielectric Integrity: Material, Process, and Tool Qualification
- Format:
- Book
- Conference/Event
- Author/Creator:
- Gupta, D. C, Author.
- Conference Name:
- Conference on Gate Dielectric Integrity (1999 : San Jose, Calif.)
- Language:
- English
- Other Title:
- Gate Dielectric Integrity
- Place of Publication:
- [Place of publication not identified] American Society for Testing & Materials 2000
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
- ISBN:
- 0-8031-5431-3
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