Semiconductor Capacitance-Type Accelerometer with PWM Electrostatic Servo Technique Hitachi Research Laboratory, Hitachi Limited

Format:

Conference/Event

Author/Creator:

Suzuki, Seiko, author.

Conference Name:

International Congress & Exposition (1991-02-25 : Detroit, Michigan, United States)

Language:

English

Physical Description:

1 online resource

Place of Publication:

Warrendale, PA SAE International 1991

Summary:

A semiconductor capacitance -type accelerometer utilizing a pulse width modulation (PWM) electrostatic servo technique has been developed. Highly accurate detection of very small and low frequency acceleration became possible with the PWM sensing method. The limited air gaps between the movable and fixed electrodes ensured compatibility between high sensitivity and durability, while transverse sensitivity and temperature coefficient were reduced due to the symmetric structure of the sensing device. This sensor has been designed for the measurement range of 0 to ±1g, ±2g and 0 to 50Hz. The accelerometer is composed of two chips: the sensing device made by silicon micromachining technology and the custom IC made by bipolar CMOS technology.In this paper, we present the fundamental sensing principle, the sensing device, the custom IC and the characteristics of the new accelerometer

Notes:

Vendor supplied data

Publisher Number:

910274

Access Restriction:

Restricted for use by site license