High Reliability High Pressure Sensor for Automotive Use Mitsubishi Electric Corporation

Format:

Conference/Event

Author/Creator:

Bessho, M., author.

Conference Name:

SAE International Congress & Exposition (1987-02-23 : Detroit, Michigan, United States)

Language:

English

Physical Description:

1 online resource

Place of Publication:

Warrendale, PA SAE International 1987

Summary:

A piezoresistive semiconductor pressure sensor that can be measure high pressure upto 3.5 Mpa within ±1% error of FS (Full Scale) has been developed; it is suitable for use in automotive electronic control systems such as suspension, transmission, anti-skid brakes and air conditioners.This pressure sensor has a silicon diaphragm in which piezoresistive elements are diffused and form a wheatstone bridge circuit to newly developed to achieve high accuracy.High resisting pressure of more than 10 MPa (300% of rated pressure) and high sensitivity of more than 100mV/V supply ·3.5 MPa were achieved by the optimum designe of diaphragm shape

Notes:

Vendor supplied data

Publisher Number:

870289

Access Restriction:

Restricted for use by site license