Silicon Microstructures: Merging Mechanics with Electronics Ford Motor Company

Format:

Conference/Event

Author/Creator:

Zanini, Margherita, author.

Conference Name:

International Congress & Exposition (1992-02-24 : Detroit, Michigan, United States)

Language:

English

Physical Description:

1 online resource

Place of Publication:

Warrendale, PA SAE International 1992

Summary:

We review the advantages of silicon micromachining in manufacturing low-cost, high-volume, mechanical sensors. The characteristics of the technology are discussed and contrasted with those of typical milling operations. We describe the fabrication of simple mechanical elements to explain how micromachined parts can be manufactured in large numbers with a high degree of dimensional control. These parts are the key components of cost-effective, high performance pressure, flow, and acceleration sensors that are gradually penetrating the automotive market

Notes:

Vendor supplied data

Publisher Number:

920472

Access Restriction:

Restricted for use by site license