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A Micromachined Silicon Mass-Air-Flow Sensor Ford Motor Company
- Format:
- Conference/Event
- Author/Creator:
- Stephan, C.H., author.
- Conference Name:
- International Congress & Exposition (1992-02-24 : Detroit, Michigan, United States)
- Language:
- English
- Physical Description:
- 1 online resource
- Place of Publication:
- Warrendale, PA SAE International 1992
- Summary:
- This paper describes the fabrication and operation of a low-cost, monolithic silicon mass-air-flow sensor (MAFS) developed for automotive applications. The device is a hot wire anemometer made of two thin single-crystal silicon beams, one being the heated element and the other serving as a temperature reference. Temperature compensation techniques and the design tradeoffs to maximize performance while ensuring durability in the harsh automotive environment are discussed
- Notes:
- Vendor supplied data
- Publisher Number:
- 920473
- Access Restriction:
- Restricted for use by site license
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