Development of a Hydrogen Gas Sensor Using Microfabrication Technology Case Western Reserve Univ

Format:

Conference/Event

Author/Creator:

Liu, Chung-Chiun, author.

Conference Name:

International Conference On Environmental Systems (1992-07-12 : Seattle, Washington, United States)

Language:

English

Physical Description:

1 online resource

Place of Publication:

Warrendale, PA SAE International 1992

Summary:

In recent years, microelectronic fabrication techniques such as photolithographic reduction, thick and thin film and reactive sputtering metallization, chemical and plasma etching, et cetera have been applied to the production of miniature and microsize chemical sensors. The introduction of solid electrolytes and conductive polymers further enhances the applicability of electrochemical and chemical sensors, particularly in a gaseous environment. Recent advances in micromachining technology also add new dimensions to the development of chemical sensors

Notes:

Vendor supplied data

Publisher Number:

921176

Access Restriction:

Restricted for use by site license