New Uses of the Electron Microprobe Analyzer in Analysis of Integrated Circuits and Packages Federal Systems Div., International Business Machines Corporation

Format:

Conference/Event

Author/Creator:

Solomon, J. L., author.

Conference Name:

Micro Electronic Packaging Conference (1968-11-20 : Palo Alto, California, United States)

Language:

English

Physical Description:

1 online resource

Place of Publication:

Warrendale, PA SAE International 1968

Summary:

This paper describes the use of the electron microprobe analyzer as an analytical tool for microelectronic devices. A comprehensive description of the construction and working of the electron microprobe analyzer is first presented. Included is a brief description of some of the basic physical laws regarding X-ray generation and analysis.Three major innovations which have made the probe the tool for microelectronic analysis are described in detail; these are: the electron beam scanning system, secondary electron display, and high resolution nondispersive energy analysis.Several examples are shown Of how these techniques may be applied to microelectronic analysis

Notes:

Vendor supplied data

Publisher Number:

680804

Access Restriction:

Restricted for use by site license