1 option
MEMS Pressure and Acceleration Sensors for Automotive Applications Motorola Sensor Products Division, Semiconductor Products Sector
- Format:
- Book
- Conference/Event
- Author/Creator:
- Verma, Rajan, author.
- Conference Name:
- SAE 2003 World Congress & Exhibition (2003-03-03 : Detroit, Michigan, United States)
- Language:
- English
- Physical Description:
- 1 online resource cm
- Place of Publication:
- Warrendale, PA SAE International 2003
- Summary:
- This paper reviews MEMS product applications in a very demanding automotive environment. Our particular interest is in the MEMS inertial and pressure sensors. Specifics of transducer manufacturing technologies will be explained in details. Also advantages and disadvantages of piezoresistive versus capacitive sensing phenomena will be discussed. Finally, main aspects of the packaging effects on the final device parameters and performance are considered too
- Notes:
- Vendor supplied data
- Publisher Number:
- 2003-01-0204
- Access Restriction:
- Restricted for use by site license
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.