Micromachined Servo Accelerometer for Harsh Environments

Format:

Conference/Event

Author/Creator:

Connolly, Thomas F., author.

Conference Name:

SAE 2001 Noise & Vibration Conference & Exposition (2001-04-30 : Grand Traverse, Michigan, United States)

Language:

English

Physical Description:

1 online resource

Place of Publication:

Warrendale, PA SAE International 2001

Summary:

Endevco has developed the Model MSA100A micromachined servo accelerometer. It utilizes a force-balance approach that demonstrates superior performance over a conventional "open loop". the accelerometer is small and rugged, with superior low frequency response down to DC. It has been optimized to provide low level measurements in the presence of severe vibrational inputs and temperatur e extremes after being subjected to large shock impacts.This paper details the design and operational features of the sensor element. The micromachined silicon sensor uses MEMS technology (microelectromechanical systems) in its fabrication. Also described is the electronic circuit used in the force-balance system, as well as the packaging of the accelerometer. Test results and application experience are presented

Notes:

Vendor supplied data

Publisher Number:

2001-01-1583

Access Restriction:

Restricted for use by site license