Reliability of Resonant Micromachined Sensors and Actuators Delphi Automotive Systems

Format:

Book

Conference/Event

Author/Creator:

Sparks, D., author.

Conference Name:

SAE 2001 World Congress (2001-03-05 : Detroit, Michigan, United States)

Language:

English

Physical Description:

1 online resource cm

Place of Publication:

Warrendale, PA SAE International 2001

Summary:

There are an increasing number of applications for resonant micromachines. Accelerometers, angular rate sensors, voltage controlled oscillators, pressure and chemical sensors have been demonstrated using this technology. Several of these devices are employed in vehicles. Vibrating devices have been made from silicon, quartz, GaAs, nickel and aluminum. Resonant microsystems are in constant motion and so present new challenges in the area of reliability for vehicular applications. The impact of temperature extremes, cyclic fatigue, stiction, thermal and mechanical shock on resonant device performance is covered

Notes:

Vendor supplied data

Publisher Number:

2001-01-0618

Access Restriction:

Restricted for use by site license