Micro-Cooler for Chip-Level Temperature Control Air Force Research Laboratory AFRL/PRPG

Format:

Conference/Event

Author/Creator:

Kirshberg, Jeffrey, author.

Conference Name:

Aerospace Power Systems Conference (1999-04-06 : Mesa, Arizona, United States)

Language:

English

Physical Description:

1 online resource

Place of Publication:

Warrendale, PA SAE International 1999

Summary:

The objective of this paper is to design and fabricate a micro-cooler to provide integral cooling to electronics or Microelectromechanical Systems (MEMS) type components utilizing current MEMS technologies. A three-port capillary pumped loop (CPL) was analyzed and fabricated from silicon and quartz for this purpose. An analytical study of the device is presented in support of this design. This proves the feasibility of such a device, and thus the rationale for continuing its development

Notes:

Vendor supplied data

Publisher Number:

1999-01-1407

Access Restriction:

Restricted for use by site license