Nanometer Displacement Measurement Using High Magnification Diffraction Imaging Ford Motor Company

Format:

Conference/Event

Author/Creator:

Chen, F., author.

Conference Name:

SAE 2005 World Congress & Exhibition (2005-04-11 : Detroit, Michigan, United States)

Language:

English

Physical Description:

1 online resource

Place of Publication:

Warrendale, PA SAE International 2005

Summary:

This paper proposes a direct nanometer measurement method using the technique of high magnification diffraction imaging. The principles of employing both gratings and speckles are described, in which the illumination distances that generate high magnified and focused images are discussed along with demonstration test results. In addition, the potential extension to sub-nanometer displacement measurement is discussed

Notes:

Vendor supplied data

Publisher Number:

2005-01-0898

Access Restriction:

Restricted for use by site license