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Microscopic Surface Electrochemical Actuators for Voltage-Tunable Optical Elements David Gonzalez-Medrano
- Format:
- Book
- Thesis/Dissertation
- Author/Creator:
- Gonzalez-Medrano, David, author.
- Language:
- English
- Subjects (All):
- 0544.
- 0652.
- 0752.
- Local Subjects:
- 0544.
- 0652.
- 0752.
- Physical Description:
- 1 electronic resource (109 pages)
- Contained In:
- Dissertations Abstracts International 87-07B
- Place of Publication:
- Ann Arbor : ProQuest Dissertations and Theses, 2025
- Language Note:
- English
- Summary:
- Voltage controllable optical resonators (VCOR) are critical to the world of photonics, theyallow dynamic tuning of the amplitude and phase of light via electric modulation of twosemi reflective plates. Here, I present a novel application of a voltage-driven micro actuatortechnology, the surface electrochemical actuator (SEA), to work as the moving top membraneof an optical resonator. These actuators are fabricated massively in parallel, in a twolayers of lithography fabrication procedure utilizing low temperature atomic layer depositionof platinum not exceeding 250C. After chemical release from their substrate, submerging inelectrolyte, and when tethered in a fixed boundary condition, the platinum actuator bucklesand exhibits maximum out-of-plane displacements on the order of several hundred nanometerswith similar further changes in displacement across a mere +/-150mV of applied biasrelative to the electrolyte solution. In the visible light range, these displacements shift thepeak of the resonant reflected wavelength across the entirety of the visible light spectrum.These actuators are microscopic in lateral dimensions ranging from 10-100 micrometers, exhibitfast response times in the tens of milliseconds, with a power consumption ranging infractions of a nanowatt. These results provide an ultra-low voltage CMOS compatible opticalresonator that can enable high-performance reflective displays and imaging
- Notes:
- Advisors: Miskin, Marc Z.; Olsson, Troy Committee members: Carpick, Robert W.; Aflatouni, Firooz
- Source: Dissertations Abstracts International, Volume: 87-07, Section: B.
- Ph.D. University of Pennsylvania 2025
- Vendor supplied data
- Local Notes:
- School code: 0175
- ISBN:
- 9798276001807
- Access Restriction:
- Restricted for use by site license
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