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Standard Guide for Analysis and Reporting the Impurity Content and Grade of High Purity Metallic Sputtering Targets for Electronic Thin Film Applications
- Format:
- Book
- Language:
- English
- Genre:
- Standards (Reference works)
- Physical Description:
- 1 online resource
- Contained In:
- ASTM Standards Library
- Place of Publication:
- West Conshohocken, PA ASTM International
- Notes:
- Machine-generated record
- OCLC:
- 1555192474
- Access Restriction:
- Restricted for use by site license
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