Optical Scattering.

Format:

Book

Author/Creator:

Stover, John C.

Contributor:

SPIE (Society), publisher.

Series:

SPIE Press monograph ; PM392.

SPIE Press monograph ; PM392

Language:

English

Subjects (All):

Light--Scattering--Measurement.

Light.

Light--Scattering.

Physical Description:

1 online resource (368 pages)

Edition:

Fourth edition.

Place of Publication:

Bellingham : SPIE, 2025.

Summary:

"The early editions of Optical Scattering were dominated by the exploration of the relationship between roughness and scatter from optically smooth surfaces by developing the relationship between the surface statistics and the measured surface scatter in BRDF units. The upper limit roughness for using scatter measurement to calculate surface roughness was well established. The basic concept of reciprocity, as it applies to scatter, could have been in the earlier editions and that mistake is corrected in this edition. The third edition added the use of scatter in the semiconductor industry, which included mapping, sizing, and identifying wafer pits and particles using their measured scatter. These concepts and the related calculations are, of course, repeated in this edition, but useful ways to move product inspection beyond the uncoated smooth surface limit are new in these pages. It may be impossible to calculate root mean square surface roughness, but it is straightforward for manufacturers to define "good" and "bad" versions of their products and then use related BRDF signals to very quickly tell the difference during manufacturing. After all, beauty is in the eye of the beholder, and what we see is scattered light. Very simple scatter measurements can detect these product differences as fast as they are produced. The differences can be changes in BRDF, or a newly defined parameter, "fractional scatter," can be tracked. Compared to expensive semiconductor measurements, inspection of everyday products (kitchen appliances, car paint, furniture appearance, etc.) for appearance represents a huge market that can be economically addressed with simple, fast scatter systems. In addition to repeating the basic scatter concepts and definitions, the fourth edition presents this as a huge underdeveloped application for scatterometry."-- Provided by publisher.

Contents:

Intro

Contents

Preface to the First Edition

Preface to the Second Edition

Acknowledgments for the Second Edition

Preface to the Third Edition

Acknowledgments for the Third Edition

Preface to the Fourth Edition

Acknowledgments for the Fourth Edition

List of Acronyms

Chapter 1 Quantifying Light Scatter

1.1 The Scattering of Light

1.2 Scatter from a Smooth Sinusoidal Surface

1.3 Scatter from Other Surfaces

1.4 Scatter from Windows and Particulates

1.5 Bidirectional Scatter Distribution Functions

1.6 Total Integrated Scatter

1.7 Differential Scattering Cross Section

1.8 Reciprocity

1.9 Summary

Chapter 2 Quantifying Surface Roughness

2.1 Profile Characterization

2.1.1 Deterministic profiles

2.1.2 Random profiles

2.1.3 Sampled profiles

2.1.4 Two-dimensional (area) profiles

2.2 The Surface Power Spectral Density and Autocovariance Functions

2.2.1 The power spectral density function from the profile

2.2.2 Extension to two-dimensional spectrums

2.2.3 The autocorrelation function

2.3 The Effects of Profile Measurement Error

2.4 Summary

Chapter 3 Scatter Calculations and Diffraction Theory

3.1 Overview

3.2 Kirchhoff, Fraunhoffer, and Fresnel Diffraction Theory

3.3 The Rayleigh Approach

3.4 Comparison of Scalar and Vector Results

3.5 Calculating Scatter from Optically Rough Surfaces

3.5.1 The Beckmann rough-surface result

3.6 Summary

Chapter 4 Using Rayleigh-Rice to Calculate Smooth-Surface Statistics from the BRDF

4.1 Practical Application of the Rayleigh-Rice Perturbation Theory

4.2 Roughness Statistics of Isotropic Surfaces

4.3 Roughness Statistics of One-Dimensional Surfaces

4.4 Roughness Statistics for the General Case

4.5 The ABC or K-Correlation Surface Power Spectrum Models

4.5.1 The Lorentzian power spectrum.

4.5.2 Fractal surfaces

4.6 The TIS Derivation from the Rayleigh-Rice Perturbation Theory

4.7 Summary

Chapter 5 Polarization of Scattered Light

5.1 A Review of Polarization Concepts

5.2 The Polarization Factor Q

5.3 Scattering Vectors and Matrices

5.4 Summary

Chapter 6 Scattering Models for Discrete Surface Features

6.1 Particle Scatter

6.2 Modeling Techniques and Accomplishments

6.3 Model Availability

6.4 Summary

Chapter 7 Instrumentation and Measurement Issues

7.1 Scatterometer Components

7.2 Instrument Signature

7.3 Aperture Effects on the Measured BSDF

7.4 Signature Reduction and Near-Specular Measurements

7.4.1 Reflective versus refractive source focusing optics

7.4.2 Minimizing the near-angle/far-angle boundary &amp

theta

N

7.4.3 Scatter measurement inside &amp

7.5 Scatter Screens

7.6 The Noise-Equivalent BSDF

7.7 Measurement of Scatter from Discrete Features in DSC Units

7.8 Measurement of Pi and Instrument Calibration

7.9 Measurement of Curved Optics

7.10 Measurement of Transmissive Samples

7.11 Coordinate Systems and Out-of-Plane Measurements

7.12 Camera-based Systems

7.13 Raster Scans

7.14 Measurement of Retroreflection

7.15 Alternative TIS Devices

7.16 Error Analysis of the Measured BSDF

7.17 Obtaining Appropriate PSD Measurements

7.18 Summary

Chapter 8 Predicting Scatter from Roughness

8.1 Optical Surfaces: Using the Rayleigh-Rice Equation

8.1.1 The general case

8.1.2 Isotropic samples

8.1.3 One-dimensional samples

8.2 Optically Rough Front-Surface Reflectors

8.2.1 Stretching the Rayleigh smooth-surface limit

8.2.2 Predicting rough-surface scatter from the PSD

8.2.3 TIS measurements and rough surfaces

8.3 Partial Data Sets

8.3.1 Fractal surfaces

8.3.2 Curve fitting.

8.4 Scatter from Diffuse Samples

8.4.1 Lambertian samples

8.4.2 Non-Lambertian samples and material signatures

8.5 BRDF Standard Surfaces

8.6 Software for Prediction of Stray Light in Optical Systems

8.7 Summary

Chapter 9 Detection of Discrete Defects

9.1 Polarization Effects Associated with Defect Scatter

9.2 Bulk Defects in Transparent Optics

9.3 Near-Point-Scatter Sources

9.4 Nontopographic Defects in Opaque Materials

9.5 Summary

Chapter 10 Appearance and Scattered Light

10.1 Beauty is in The Eye of the Beholder-And What We See is Scattered Light

10.2 Practical Appearance Monitoring

10.3 Other Examples

10.4 Summary

Chapter 11 Real Scatter Measurement Applications

11.1 Scatter Research Laboratories

11.2 Semiconductor Applications

11.2.1 Finding small particulates and point defects on polished surfaces

11.2.2 Scattering and roughness characterization of silicon

11.2.3 Particle scanner inspection of wafers

11.2.4 Wafer roughness maps

11.3 Computer Disks

11.4 Measurement of Retinal Scatter Induced by Intraocular Lenses

11.5 Contamination Measurement by Wavelength Discrimination

11.6 Solar Energy Applications

11.6.1 Photovoltaic collectors

11.7 General Manufacturing Examples

11.7.1 Detection of paper flaws

11.7.2 Noncontact monitoring of emissivity and temperature

11.7.3 Ball bearings

11.7.4 Use of ''good'' and ''bad'' samples

11.8 Summary

Chapter 12 Published Scatter Standards

12.1 Integrated Scatter Standards

12.2 Angle-Resolved Scatter Standards

12.3 The PSD Standard

12.4 Standards for Semiconductor Particle Scanners

12.4.1 SEMI M52-Scanner specifications

12.4.2 M50-Capture rate

12.4.3 M53-Scanner calibration

12.4.4 M58-Particle deposition confirmation

12.5 Summary

Chapter 13 Scatter Specifications.

13.1 Generic Specifications

13.2 Application-Specific Specifications

13.2.1 Example 1: Scatterometer-focusing mirrors

13.2.2 Example 2: Imaging optics

13.2.3 Example 3: Laser resonator losses

13.2.4 Example 4: Diffraction from precision-machined turning mirrors

13.2.5 Example 5: Scatter in a laser rangefinder

13.2.6 Example 6: Roughness specifications for semiconductor components

13.3 Empirical Scatter Specifications

13.4 Summary

Appendix A Review of Electromagnetic Wave Propagation

A.1 The Wave Equation

A.2 Electromagnetic Plane Waves in Free Space

A.3 Plane Waves in a Dielectric

A.4 Plane Waves in a Conducting Medium

Appendix B Kirchhoff Diffraction from Sinusoidal Gratings

Appendix C BSDF Data

Appendix D Units

Appendix E SEMI Scatter-Related Standards

References

Works Consulted

Index.

Notes:

Includes bibliographical references and index.

Title from PDF title page (SPIE eBooks Website, viewed 2025-12-12)

Description based on publisher supplied metadata and other sources.

ISBN:

1-5106-9029-8

OCLC:

1545128207