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Halbleiterepitaxie / Helmut Günther Schneider.
- Format:
- Book
- Author/Creator:
- Schneider, Helmut Günther, Author.
- Series:
- Technisch-Physikalische Monographien Series
- Technisch-Physikalische Monographien ; 43
- Language:
- German
- Subjects (All):
- Epitaxy.
- Physical Description:
- 1 online resource (332 p.) : 134 Abb., 30 Tab.
- Edition:
- Reprint 2021
- Place of Publication:
- Berlin ; Boston : De Gruyter, [2022]
- Language Note:
- In German.
- Summary:
- Keine ausführliche Beschreibung für "Halbleiterepitaxie" verfügbar.
- Contents:
- Frontmatter
- Vorwort
- Inhalt
- 1. Allgemeine Grundsätze
- Literatur zu Kapitel 1
- 2. Silicium-Homoepitaxie
- Literatur zu Kapitel 2
- 3. Epitaxie von Silicium auf isolierendem Substrat
- Literatur zu Kapitel 3
- 4. Epitaxie von Verbindungshalbleitern
- Literatur zu Kapitel 4
- Sachregister
- Notes:
- Description based on online resource; title from PDF title page (publisher's Web site, viewed 31. Jan 2022)
- Description based on publisher supplied metadata and other sources.
- ISBN:
- 3-11-248440-1
- OCLC:
- 1534198998
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