Plasma Chemistry / hrsg. von S. Vepřek, M. Venugopalan.

Format:

Book

Contributor:

Bell, Alexis T., Contributor.

Coburn, John, Contributor.

Dilks, Alan, Contributor.

Kay, Eric, Contributor.

Venugopalan, M., Editor.

Vepřek, S., Editor.

Winters, Harold F., Contributor.

Language:

German

Subjects (All):

Plasma chemistry.

Physical Description:

1 online resource (130 p.)

Edition:

Die Originalausgabe erscheint im Springer-Verlag Berlin-Heidelberg: New York in der Schriftenreihe „Topics in Current Chemistry”, Volume 94, Reprint 2021

Place of Publication:

Berlin ; Boston : De Gruyter, [2022]

Language Note:

In German.

Summary:

Keine ausführliche Beschreibung für "Plasma Chemistry" verfügbar.

Contents:

Frontmatter

Contents

Plasma Chemistry of Fluorocarbons as Related to Plasma Etching and Plasma Polymerization

The Mechanism and Kinetics of Plasma Polymerization

Elementary Processes at Solid Surfaces Immersed in Low Pressure Plasmas

Notes:

Description based on online resource; title from PDF title page (publisher's Web site, viewed 02. Mrz 2022)

Description based on publisher supplied metadata and other sources.

ISBN:

3-11-253954-0

OCLC:

1301549725