1 option
Chemistry of atomic layer deposition / Seán T. Barry.
- Format:
- Book
- Author/Creator:
- Barry, Seán T., 1968- author.
- Series:
- De Gruyter Textbook
- Language:
- English
- Subjects (All):
- Surface chemistry.
- Atomic layer deposition.
- Physical Description:
- 1 online resource (116 pages)
- Edition:
- 1st ed.
- Place of Publication:
- Berlin ; Boston : Walter de Gruyter GmbH, [2022]
- Summary:
- This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes.
- Contents:
- Intro
- Foreword
- Contents
- Chapter 1 Introduction
- Chapter 2 Saturation
- Chapter 3 Ligands
- Chapter 4 Precursors
- Chapter 5 Thermolysis
- Chapter 6 Nucleation
- Chapter 7 ALD processes
- Chapter 8 MLD processes
- Chapter 9 ALE processes
- Index.
- Notes:
- Includes index.
- Description based on print version record.
- Description based on publisher supplied metadata and other sources.
- ISBN:
- 3-11-071253-9
- OCLC:
- 1298392553
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.