Silicon Carbide Wafer Manufacturing, Optoelectronic and Electronic Devices and Technologies / edited by Juraj Marek.

Format:

Book

Contributor:

Marek, Juraj, editor.

Series:

Diffusion and defect data Solid state phenomena ; Pt. B, Volume 343

Solid State Phenomena, 1662-9779 ; Volume 343

Language:

English

Subjects (All):

Semiconductor wafers.

Semiconductor wafers--Automatic control.

Physical Description:

1 online resource (116 pages)

Edition:

First edition.

Place of Publication:

Baech, Switzerland : Trans Tech Publications Ltd, [2023]

Summary:

Special topic volume with invited peer-reviewed papers only.

Contents:

Intro

Silicon Carbide Wafer Manufacturing, Optoelectronic and Electronic Devices and Technologies

Preface

Table of Contents

Chapter 1: Silicon Carbide Wafer Manufacturing

Epitaxial Growth of Boron Carbide on 4H-SiC

Prevention of Bunched Basal Plane Dislocation Arrays in 4H-SiC PVT-Growth

Improvement of the Conformational Stability of 150 mm 4H SiC Wafers

High Quality Single Crystal Recrystallization of Thin 4H-SiC Films Deposed by PVD Techniques, a way for New Emerging Fields

Effect of Sub-Surface Damage Layer Removal by Sublimation Etching of 4H-SiC Bulk Wafers on PL Imaging of Crystal Defect Visibility

Temperature Gradient Control with an Air-Pocket Design for Growth of High Quality SiC Crystal

4H-SiC Full Wafer Mapping Image of CMP-Finished Sub-Surface Damage by Laser Light Scattering

Investigation of the Nucleation Process during the Initial Stage of PVT Growth of 4H-SiC

Al Implantation in Sic

Where Will the Ions Come to Rest?

Chapter 2: Electronic Packaging

Analysis of Transmission Performance for Fine Pitch Interconnect

Interfacial Delamination Validation on Fan-Out Wafer-Level Package Using Finite Element Method

Fabrication of Nanocomposite PDMS/Graphene as Flexible Substrate at Different Graphene Volume

Chapter 3: Optoelectronic and Electronic Devices

Performance of MOS Capacitor with Different Dielectric Material Simulated Using Silvaco TCAD Tools

Humidity Sensor Performance Based ZnO/SnO2 Nanorods Structure Using Different ZnO Seed Layer

Opto-Electronic Characterisation of GaAsBi/GaAs Multiple Quantum Wells for Photovoltaic Applications

Characterization of Breath Sensor at Different Frequencies in Outdoor Condition

Keyword Index

Author Index.

Notes:

Description based on publisher supplied metadata and other sources.

Description based on print version record.

Other Format:

Print version: Marek, Juraj Silicon Carbide Wafer Manufacturing, Optoelectronic and Electronic Devices and Technologies

ISBN:

9783036413259

3036413251

OCLC:

1381711751