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Electron beam induced damage in PECVD Si₃N₄ and SiO₂ films on InP / Dragan M. Pantie [and four others].
Connect to full text Available online
View online- Format:
- Book
- Government document
- Author/Creator:
- Pantic, Dragan M., author.
- Series:
- NASA technical memorandum ; 102544.
- NASA technical memorandum ; 102544
- Language:
- English
- Genre:
- Online resources.
- Physical Description:
- 1 online resource (15 pages) : illustrations.
- Place of Publication:
- Cleveland, Ohio : National Aeronautics and Space Administration, Lewis Research Center, [1990]
- Notes:
- "Performing organization: National Aeronautics and Space Administration, Lewis Research Center"--Report documentation page.
- Includes bibliographical references (page 13).
- Online resource; title from PDF title page (NASA, viewed July 24, 2017).
- Other Format:
- Microfiche version: Electron beam induced damage in PECVD Si₃N₄ and SiO₂ films on InP
- OCLC:
- 994303469
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