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Development of a photoelectrochemical etch process to enable heterogeneous substrate integration of epitaxial III-nitride semiconductors / Vijay Parameshwaran [and six others].
- Format:
- Book
- Government document
- Author/Creator:
- Parameshwaran, Vijay, author.
- Language:
- English
- Subjects (All):
- Photoelectrochemistry.
- Nitrides.
- Inhomogeneous materials.
- Genre:
- Online resources.
- Physical Description:
- 1 online resource (vi, 10 pages) : illustrations
- Place of Publication:
- Adelphi, MD : US Army Research Laboratory, December 2017.
- Notes:
- "ARL-TR-8228."
- "Dec 2017."
- Includes tables.
- Includes bibliographical references (page 8).
- Online resource; title from PDF title page (ARL website, viewed February 28, 2019).
- OCLC:
- 1088728495
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