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Parametric approach to determining the optimum geometry for PZT MEMS switches intended for digital applications / Robert Proie [and others].
Connect to full text Available online
View online- Format:
- Book
- Government document
- Series:
- ARL-TR (Aberdeen Proving Ground, Md.) ; 5404.
- ARL-TR ; 5404
- Language:
- English
- Subjects (All):
- Microelectromechanical systems.
- Piezoelectricity.
- Physical Description:
- 1 online resource (iv, 12 pages) : color illustrations.
- Place of Publication:
- Adelphi, MD : Army Research Laboratory, [2010]
- Notes:
- Title from title screen (viewed on Jan. 4, 2012).
- "December 2010."
- Includes bibliographical references (page 9).
- Other Format:
- Print version: Parametric approach to determining the optimum geometry for PZT MEMS switches intended for digital applications
- OCLC:
- 770299790
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