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Patterning of thick parylene films by oxygen plasma for application as exploding foil initiator flyer material / by Eugene Zakar and Michael D. Grapes.
Connect to full text Available online
View online- Format:
- Book
- Government document
- Author/Creator:
- Zakar, Eugene
- Series:
- ARL-TR (Aberdeen Proving Ground, Md.) ; 4956.
- ARL-TR ; 4956
- Language:
- English
- Subjects (All):
- Microelectromechanical systems.
- Thick films.
- Polymers.
- polymers.
- Physical Description:
- 1 online resource (vi, 16 pages) : illustrations (some color)
- Place of Publication:
- Adelphi, MD : Army Research Laboratory, [2009]
- Notes:
- Title from title screen (viewed March 12, 2010).
- "September 2009."
- Includes bibliographical references (page 14).
- OCLC:
- 495784026
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